ECE228: Engineering of Thin Film Deposition

The deposition of thin films has been playing a key role in various technologies. Thin films with unprecedented physical properties will continuously allow us to envision a new paradigm in a range of technologies. The deposition of thin films depends on such factors as thermodynamics in deposition environment and kinetics on solid surfaces where atoms are assembled; thus understanding fundamental processes involved in the deposition is important. In this course, several key processes will be discussed in order to build a coherent picture of the deposition of thin films. The course also offer an opportunity of practically implementing general computing resources in describing the formation of thin films.

5 Credits

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