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Introduction to MEMS technology: covers basic microfabrication technologies, the governing physics for MEMS devices in different energy domains (mechanical, electrical, optical, thermal, and fluidic). Fabrication and design of MEMS devices illustrated using examples of existing research prototypes and commercial products. Students design, lay out, and fabricate an optical MEMS deformable mirror device for applications in adaptive optics. Students are billed a materials fee. Prerequisite(s): courses 135, 145, and 211; and Physics 5A, 5B, and 5C. Enrollment restricted to seniors and graduate students. May be repeated for credit. J. Kubby
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