Micro-Electro-Mechanical Systems (MEMS) Design

Course Description/Objectives:

Introduction to Micro-Electro-Mechanical Systems (MEMS) design.  The course will begin with an overview of MEMS devices and the processes that are used to fabricate them.  The basic governing equations for MEMS devices in different energy domains (mechanical, electrical, optical, thermal and fluidic) will be reviewed. Students will then work in teams to design and layout a MEMS device using a standard multi-user MEMS process available through a foundry service.  A presentation and term paper describing the design and layout will be required.  MEMS design is highly interdisciplinary and students from astronomy, biology, engineering and physics with an interest in instrumentation are strongly encouraged to enroll.


1)      Introduction and Overview

2)      Design Challenge

3)      Layout & Modeling

4)      Micromachining Techniques

5)      Micro-Mechanics

6)      Electrostatics

7)      Optical MEMS

8)      Thermal MEMS

9)      Fluidic MEMS

10)    Packaging

Text: A Guide to Hands-On MEMS Design and Prototyping by Joel A. Kubby

Instructors and Assistants